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|Type:||Aton Back Contact Machine|
This Asset is part of the Auction for : LATE MODEL SOLAR THINFILM PANEL PRODUCTION EQUIPMENT
Sputtering System (horizontal) for substrates with max 1400mm height, with 3 planar kathodes (Wide Single Magnetrons) and 1 kathode placeholder (empty), tool was used for ZNO/Ag/Ti deposition, Lot to include Pumping stands with (3) Ruvac Rootspump and (3) Leybold Vacuum Pumps for infeed/outfeed chamber and transfer chamber, (16) Leybold Turbo Pumps for process chambers, Lot to include severall spare parts and target materials
Aton Back Contact Machine
You can download the brochure for the auction here: